White light interferometric thickness sensor
I-series spectroscopic interferometric thickness sensor
The I-series white light interferometric thickness gauge adopts the principle of spectroscopic interferometry. By analyzing the interference signals formed by the reflected light from the upper and lower surfaces of the thin film, it achieves high-precision non-contact measurement of the thickness of transparent and semi-transparent thin films and coatings. The product features nanometer-level repeatability, a maximum sampling speed of 10 kHz, and a wide working distance range. It is suitable for thickness measurement of PCB protective coatings, PET multilayer films, UTG ultrathin flexible glass, wafer bonding layers, TSV through-silicon vias, and during grinding and polishing processes.
Send InquiryKey Features
- • Utilizing the principle of spectroscopic interference, this method is suitable for measuring the thickness of thin films and coatings. It employs non-contact measurement, avoiding damage to the surface of the material being measured. Repeatability up to 1 nm, suitable for nanometer-level thickness detection, linear accuracy up to ±20 nm, and high measurement stability, allows for sampling speeds up to 10 kHz, making it suitable for online inspection scenarios. It supports thickness measurement of transparent and semi-transparent materials and multilayer films. A wide working distance range facilitates integration with automated equipment. Strong anti-interference capabilities make it suitable for continuous inspection in industrial settings.
Applications
- • PCB protective coating thickness measurement
- • PET multilayer film thickness measurement
- • UTG ultrathin flexible glass thickness measurement
- • Transparent film and coating thickness inspection
- • Advanced packaging process wafer bonding layer thickness measurement
- • TSV through-silicon via depth inspection
- • Wafer grinding and polishing process thickness monitoring
- • Semiconductor packaging material thickness inspection
- • Online thickness measurement on automated production lines
Specifications
View detailed specifications
I-Series Spectroscopic Interferometric Thickness Sensor Specifications
| Item | IVS-100 | IVS-100W | IVS-50 | IVS-50W |
|---|---|---|---|---|
| Controller | IVCS-100 | IVCS-100W | IVCS-50 | IVCS-50W |
| Compatible probe | IRVP-TVF | IVP-T10-UV-VIS | IRVP-TVF | IVP-T10-UV-VIS |
| Recommended working distance | 55 mm ±2 mm | Non-focused; 5 to 10 mm installation distance | 55 mm ±2 mm | Non-focused; 5 to 10 mm installation distance |
| Measuring angle | ±5° | ±10° | ±5° | ±10° |
| Spot | Focused, Φ100 μm | Diffuse, approximately Φ4 mm at 10 mm | Focused, Φ100 μm | Diffuse, approximately Φ4 mm at 10 mm |
| Thickness range at refractive index 1.5 | Approx. 2 μm to 100 μm | Approx. 2 μm to 100 μm | Approx. 1 μm to 50 μm | Approx. 1 μm to 50 μm |
| Repeatability | 1 nm | 1 nm | 1 nm | 1 nm |
| Linearity error | <±20 nm | <±20 nm | <±20 nm | <±20 nm |
| Sampling frequency | Max. 10 kHz | Max. 10 kHz | Max. 10 kHz | Max. 10 kHz |
| Encoder input | AB / ABZ configurable trigger input | AB / ABZ configurable trigger input | AB / ABZ configurable trigger input | AB / ABZ configurable trigger input |
| Analog output | 0–5 V / 0–10 V / ±5 V / ±10 V; 4–20 mA | Same | Same | Same |
| Ethernet | 100BASE-TX | 100BASE-TX | 100BASE-TX | 100BASE-TX |
| USB | USB 2.0 Full Speed | USB 2.0 Full Speed | USB 2.0 Full Speed | USB 2.0 Full Speed |
| RS485 | Modbus, 19,200 to 115,200 baud | Same | Same | Same |
| Supply | 24 VDC ±10% | 24 VDC ±10% | 24 VDC ±10% | 24 VDC ±10% |