Chromatic Confocal Sensor

C-series spectral confocal displacement sensor

Name: C-series spectral confocal displacement sensor
Brand: Shuoertai Sensor

The C-series spectral confocal displacement sensor employs a non-contact, high-precision measurement method, suitable for precision inspection scenarios such as displacement, thickness, step difference, contour, and flatness. The product features a small spot size, high resolution, and good stability, and can be applied to the inspection of materials such as glass, wafers, thin films, metal mirrors, ceramics, semiconductors, and precision components. It is suitable for integration into automated equipment and online quality monitoring.

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Key Features

• Non-contact high-precision displacement measurement
• Small spot design, suitable for detecting minute areas
• Can measure transparent, translucent, and highly reflective materials
• Supports displacement, thickness, step difference, and contour detection
• Good measurement stability, suitable for integration into automated equipment
• Flexible selection based on range, accuracy, and application scenario

Applications

• Glass thickness measurement; Wafer height and thickness inspection; Thin film coating thickness inspection; Metal mirror displacement measurement; Dimensional inspection of ceramics and precision parts; Step, flatness, and contour inspection; Online inspection of semiconductor and new energy materials; Closed-loop control of automated equipment.

Specifications

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C-Series Spectral Confocal Probe Specifications

Model	Reference Distance	Measuring Range	Measuring Angle	Spot Diameter	Repeatability	Linearity Error	Rating
C100B	8 mm	±0.05 mm	±46.5°	Φ2.7 μm / 5.4 μm	3 nm	<±0.03 μm	IP40
C400	10 mm	±0.2 mm	±43°	Φ7 μm / 14 μm / 112 μm	12 nm	<±0.08 μm	IP40
C600	6.5 mm	±0.3 mm	±32.5°	Φ8 μm / 16 μm	16 nm	<±0.12 μm	IP40
C1200	20 mm	±0.6 mm	±32°	Φ9.5 μm / 19 μm / 152 μm	30 nm	<±0.24 μm	IP40
C1400	13.8 mm	±0.7 mm	±18.5°	Φ12 μm	30 nm	<±0.1 μm	IP40
C2000	50 mm	±1 mm	±14°	Φ20 μm / 40 μm	85 nm	<±0.6 μm	IP40
C2400	9 mm	±1.2 mm	±60°	Φ5.5 μm / 11 μm / 88 μm	45 nm	<±0.12 μm	IP40
C2600	15 mm	±1.3 mm	±31°	Φ9 μm / 18 μm / 144 μm	50 nm	<±0.26 μm	IP40
C2600H	15 mm	±1.3 mm	±31°	Φ9 μm / 18 μm / 144 μm	50 nm	<±0.3 μm	IP40
C3000	7 mm	±1.5 mm	±12.5°	Φ20 μm	100 nm	<±0.6 μm	IP67
C4000F	38 mm	±2 mm	±21°	Φ16 μm / 32 μm / 256 μm	100 nm	<±0.4 μm	IP40
C6000	40 mm	±3 mm	±14°	Φ22 μm / 44 μm / 352 μm	140 nm	<±0.72 μm	IP40
C7000	45 mm	±3.5 mm	±15.5°	Φ20 μm / 40 μm / 320 μm	140 nm	<±0.7 μm	IP40
C7000L	47 mm	±3.5 mm	±21°	Φ16 μm / 32 μm	140 nm	<±0.7 μm	IP40
C7000S	70 mm	±3.5 mm	±10°	Φ25 μm / 50 μm / 400 μm	200 nm	<±1.4 μm	IP40
C8000 Straight	54.5 mm	±4 mm	±7.3°	Φ34 μm / 68 μm	250 nm	<±1.6 μm	IP40
C8000 Folded	54.5 mm	±4 mm	±7.3°	Φ34 μm / 68 μm	250 nm	<±1.6 μm	IP40
C7000XS	25 mm	±3.5 mm	±15°	Φ17 μm	114 nm	<±0.5 μm	IP67
C7000XS Rear Fold	25 mm	±3.5 mm	±15°	Φ17 μm	140 nm	<±0.5 μm	IP67
C10000	50 mm	±5 mm	±13°	Φ20 μm / 40 μm / 320 μm	250 nm	<±1 μm	IP40

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Common problems and troubleshooting suggestions in the use of spectral confocal displacement sensors